Axis 850 User Manual download pdf (Page 2)

Appendix Micropositioning Nanometrology

Hexapods

Parallel Kinematics

Nanopositioning &

Piezoelectrics

Linear Actuators &

Motors

Hexapod SyStemS | www.pi.wS

H-850.H1x H-850.G1x Unit Tolerance

for high

er loads and holding forces

for high

er velocity and precision

Active a

xes

X, Y, Z, θ

X

, θ

Y

, θ

Z

X, Y, Z, θ

X

, θ

Y

, θ

Z

Motion an

d positioning

Travel r

ange* X, Y

±50 ±50 mm

Travel r

ange* Z

±25 ±25 mm

Travel ra

nge* θ

X

, θ

Y

±15 ±15 °

Travel ra

nge* θ

Z

±30 ±30 °

Single

-actuator design resolution

0.005 0.05 µm

Min. inc

remental motion X, Y

1 1 µm typ.

Min

. incremental motion Z

0.5 0.5 µm typ.

Min

. incremental motion θ

X

, θ

Y

, θ

Z

5 5 µrad typ.

Backlash X, Y

4 5 µm typ.

Bac

klash Z

1 1.5 µm typ.

Bac

klash θ

X

, θ

Y

15 25 µrad typ.

Backlash θ

Z

30 45 µrad typ.

Repeatability X, Y

±1 ±0.5 µm typ.

Rep

eatability Z

±0.3 ±0.2 µm typ.

Rep

eatability θ

X

, θ

Y

±5 ±3 µrad typ.

Repeatability θ

Z

±9 ±6 µrad typ.

Max. velocity X, Y, Z

0.5 8 mm/s

Max. vel

ocity θ

X

, θ

Y

, θ

Z

6 100 mrad/s

Typ. vel

ocity X, Y, Z

0.3 5 mm/s

Typ. vel

ocity θ

X

, θ

Y

, θ

Z

3 50 mrad/s

Mechani

cal properties

Stiffness X, Y

7 7 N/µm

Stiffn

ess Z

100 100 N/µm

Load (ba

se plate horizontal / any orientation)

250 / 50 50 / 20 kg max.

Hol

ding force, de-energized

2000 / 500 250 / 85 N max.

(ba

se plate horizontal / any orientation)

Motor type

DC moto

r, gearhead

DC moto

r, gearhead

Miscellaneous

Operating temperature range

-10 to 50 -10 to 50 °C

Materia

l

Aluminum Aluminum

Mass 17 17 kg ±5%

Cab

le length 3 3 m ±10 mm

Vacuum versions to 10

-6

hPa are availab-

le under the following ordering number:

H-850.xV. Speciﬁcations for vacuum

versions can differ.

Technical data speciﬁed at 20±3°C.

Ask about custom designs!

* The travel ranges of the individual

coordinates (X, Y, Z, θ

X

, θ

Y

, θ

Z

) are

interdependent. The data for each

axis in this table shows its maximum

travel, where all other axes are at their

zero positions. If the other linear or

rotational coordinates are not zero, the

available travel may be less.

H-850, dimensions in mm

1 2 3 4 5 6 7 8 9 10

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