Axis 7100 Installation Guide Page 1

Your Resource for Advanced Dicing SolutionsADT 7100Dicing SeriesVectus/Fortis Model TypesOperations ManualSoftware Version 5.6.3P/N 97100-9002-000-14J

Reference DocumentsAdvanced Dicing Technologies Ltd.xReference Documents• ADT Model 7100 Semi-Automatic Dicing System Maintenance Manual. It provides

Placing/Removing a WorkpieceAdvanced Dicing Technologies Ltd.3.5-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualModel 7100 WorkflowsP/N 97100-9002-000-14 Ver 06/053.6-13.6 Model 7100 WorkflowsThe work

Model 7100 WorkflowsAdvanced Dicing Technologies Ltd.3.6-2For additional information about Defining Jobs, see section 3.4. For additional information

ADT Model 7100 Semi-Automatic Dicing System Operations ManualModel 7100 WorkflowsP/N 97100-9002-000-14 Ver 06/053.6-33.6.2 Auto Mode Workflow - New R

Model 7100 WorkflowsAdvanced Dicing Technologies Ltd.3.6-4Inspection Illumination: Teaching the Inspection Illumination for the best view of the workp

ADT Model 7100 Semi-Automatic Dicing System Operations ManualModel 7100 WorkflowsP/N 97100-9002-000-14 Ver 06/053.6-53.6.3 Manual Mode WorkflowWhen o

Model 7100 WorkflowsAdvanced Dicing Technologies Ltd.3.6-63.6.4.1 Defining JobsWhen defining jobs, the User selects a Recipe to be assigned to a Workp

ADT Model 7100 Semi-Automatic Dicing System Operations ManualModel 7100 WorkflowsP/N 97100-9002-000-14 Ver 06/053.6-73.6.4.5 Manual AlignmentWhen per

Model 7100 WorkflowsAdvanced Dicing Technologies Ltd.3.6-8

ADT Model 7100 Semi-Automatic Dicing System Operations ManualStopping System OperationP/N 97100-9002-000-14 Ver 06/053.7-13.7 Stopping System Operati

ADT Model 7100 Semi-Automatic Dicing System Operations ManualConventionsP/N 97100-9002-000-14 Ver 06/05xiCONVENTIONSThis section explains basic symbol

Stopping System OperationAdvanced Dicing Technologies Ltd.3.7-23.7.3 Pausing a ProcessWhen running in Auto mode, System operation can be paused at any

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLog FileP/N 97100-9002-000-14 Ver 06/053.8-13.8 Log FileThe Model 7100 software generate

Log FileAdvanced Dicing Technologies Ltd.3.8-2Time and Date SettingsBy default, the Time and Date setting for the current Log File is twelve hours bac

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLog FileP/N 97100-9002-000-14 Ver 06/053.8-33.8.3 Exporting Log FilesLog data can be exp

Log FileAdvanced Dicing Technologies Ltd.3.8-4

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAdministrationP/N 97100-9002-000-14 Ver 06/054-14 ADMINISTRATIONAccess Levels are catego

AdministrationAdvanced Dicing Technologies Ltd.4-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAccess LevelsP/N 97100-9002-000-14 Ver 06/054.1-14.1 Access LevelsThere are five Access

Access LevelsAdvanced Dicing Technologies Ltd.4.1-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualModifying Access LevelsP/N 97100-9002-000-14 Ver 06/054.2-14.2 Modifying Access LevelsUs

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAdvanced Dicing Technologies Ltd.xiiAbbreviations and AcronymsA AmpsBBD Broken Blade Dete

Modifying Access LevelsAdvanced Dicing Technologies Ltd.4.2-2To Modify Access Rights to Parameters:1 Double-click anywhere in the access rights column

ADT Model 7100 Semi-Automatic Dicing System Operations ManualModifying Access LevelsP/N 97100-9002-000-14 Ver 06/054.2-3Importing and Exporting Recip

Modifying Access LevelsAdvanced Dicing Technologies Ltd.4.2-42 The existing access rights for the selected element appear in a multi-colored bar, as f

ADT Model 7100 Semi-Automatic Dicing System Operations ManualModifying Access LevelsP/N 97100-9002-000-14 Ver 06/054.2-54.2.3 Protected ModeThe Model

Modifying Access LevelsAdvanced Dicing Technologies Ltd.4.2-6with access to unprotected mode but with no ability to modify the access rights of other

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAdding and Removing UsersP/N 97100-9002-000-14 Ver 06/054.3-14.3 Adding and Removing Use

Adding and Removing UsersAdvanced Dicing Technologies Ltd.4.3-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBuilding RecipesP/N 97100-9002-000-145-15 BUILDING RECIPESRecipes are the settings, algor

Building RecipesAdvanced Dicing Technologies Ltd.5-2• The type of blade to be used for this recipe, including the size, exposure, and thickness.• The

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBuilding Recipes WorkflowP/N 97100-9002-000-14 Ver 06/055.1-15.1 Building Recipes Workfl

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTable of ContentsP/N 97100-9002-000-14 Ver 06/05xiiiTABLE OF CONTENTSSafety First _____

Building Recipes WorkflowAdvanced Dicing Technologies Ltd.5.1-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCreating a New RecipeP/N 97100-9002-000-14 Ver 06/055.2-15.2 Creating a New RecipeWhen f

Creating a New RecipeAdvanced Dicing Technologies Ltd.5.2-2create a new Template Recipe that will be kept permanently, type "Template_" befo

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDefining Recipe PropertiesP/N 97100-9002-000-14 Ver 06/055.3-15.3 Defining Recipe Proper

Defining Recipe PropertiesAdvanced Dicing Technologies Ltd.5.3-2To Define Recipe Properties:1 Click to display the Programming Workspace.Author The

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDefining Recipe PropertiesP/N 97100-9002-000-14 Ver 06/055.3-32 Select the Recipe from t

Defining Recipe PropertiesAdvanced Dicing Technologies Ltd.5.3-45.3.1 Defining Blade PropertiesThe blade property of the Recipe specifies the name of

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDefining Recipe PropertiesP/N 97100-9002-000-14 Ver 06/055.3-5A list of existing blades

Defining Recipe PropertiesAdvanced Dicing Technologies Ltd.5.3-65.3.2.1 Changing Blades in a RecipeA blade assigned to the recipe can be changed by pe

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDefining Recipe PropertiesP/N 97100-9002-000-14 Ver 06/055.3-7To Define a new blade:1 Cl

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTable of ContentsAdvanced Dicing Technologies Ltd.xiv3.1.1 Powering Up the System ______

Defining Recipe PropertiesAdvanced Dicing Technologies Ltd.5.3-85.3.2.4 Deleting BladesBlades can be deleted from the System by performing the procedu

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecifying Recipe ParametersP/N 97100-9002-000-14 Ver 06/055.4-15.4 Specifying Recipe Pa

Specifying Recipe ParametersAdvanced Dicing Technologies Ltd.5.4-2Table 5-3: Parameter CategoriesParameter Category DescriptionAir Defines the duratio

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecifying Recipe ParametersP/N 97100-9002-000-14 Ver 06/055.4-3Loop cut Defines how to

Specifying Recipe ParametersAdvanced Dicing Technologies Ltd.5.4-4To Display Recipe Parameters:1 Expand the Recipe in the Programming tree to display

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecifying Recipe ParametersP/N 97100-9002-000-14 Ver 06/055.4-55.4.3 General and Angle

Specifying Recipe ParametersAdvanced Dicing Technologies Ltd.5.4-6To Define New Angles:1 In the Programming Workspace, right-click on any existing Ang

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecifying Recipe ParametersP/N 97100-9002-000-14 Ver 06/055.4-7To Move Angle Tabs in th

Specifying Recipe ParametersAdvanced Dicing Technologies Ltd.5.4-82 Click Change to display the following dialog box:3 Enter the new angle, then click

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecifying Recipe ParametersP/N 97100-9002-000-14 Ver 06/055.4-92In the Parameter area b

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTable of ContentsP/N 97100-9002-000-14 Ver 06/05xv5.4.2 Monitoring the Cutting Process

Specifying Recipe ParametersAdvanced Dicing Technologies Ltd.5.4-10To Modify Parameter Values:1 In the Parameter Table, double-click the Value cell of

ADT Model 7100 Semi-Automatic Dicing System Operations ManualImporting and Exporting RecipesP/N 97100-9002-000-14 Ver 06/055.5-15.5 Importing and Exp

Importing and Exporting RecipesAdvanced Dicing Technologies Ltd.5.5-24 [optional] Change the name of the Recipe by entering a new name in the Change R

ADT Model 7100 Semi-Automatic Dicing System Operations ManualImporting and Exporting RecipesP/N 97100-9002-000-14 Ver 06/055.5-34 [optional] Change t

Importing and Exporting RecipesAdvanced Dicing Technologies Ltd.5.5-4

ADT Model 7100 Semi-Automatic Dicing System Operations ManualRecipe TemplatesP/N 97100-9002-000-14 Ver 06/055.6-15.6 Recipe TemplatesAs explained abo

Recipe TemplatesAdvanced Dicing Technologies Ltd.5.6-25.6.2 APC Loop Cut TemplateFigure 5-24: APC Standard Cut MapAngle 0 Angle 90ParametersWork piece

ADT Model 7100 Semi-Automatic Dicing System Operations ManualRecipe TemplatesP/N 97100-9002-000-14 Ver 06/055.6-35.6.3 GPC Standard TemplateFigure 5-

Recipe TemplatesAdvanced Dicing Technologies Ltd.5.6-45.6.4 GPC Multi Die Size TemplateFigure 5-26: GPC Standard Cut MapAngle 0 Angle 90ParametersWork

ADT Model 7100 Semi-Automatic Dicing System Operations ManualRecipe TemplatesP/N 97100-9002-000-14 Ver 06/055.6-55.6.5 Standard Dressing TemplateFigu

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTable of ContentsAdvanced Dicing Technologies Ltd.xvi6.5.4 Chopping _____________________

Recipe TemplatesAdvanced Dicing Technologies Ltd.5.6-65.6.6 GPC Dressing TemplateAngle 0 Angle 90ParametersWorkpiece Shape RectangularWorkpiece Size 1

ADT Model 7100 Semi-Automatic Dicing System Operations ManualP/N 97100-9002-000-14 Ver 06/056-16 DICER PROCEDURESThis chapter contains the instructio

Dicer ProceduresAdvanced Dicing Technologies Ltd.6-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-16.1 Workpiece AlignmentAlignment

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-26.1.1 Manual AlignmentManual Alignment is generally used when there are no eyepoints for Auto

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-3the location in the FOV. Adjust t

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-4To Define the Cut Position:1 Use the X/Y-Axis Controls to move the Camera to the reference po

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-56.1.2.1 Teach IndexTeaching the I

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-64 Scroll to the Index parameter and click the cell containing the value defined for the Index

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-78 Define a Cut Position (see sect

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTable of ContentsP/N 97100-9002-000-14 Ver 06/05xvii8.8 Database Backup ________________

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-8flashes a score indicating whether the Model has been successfully found and displaying the i

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-9Index is defined and flashed on t

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-10Street: Auto Alignment is performed by finding a Model (repeating pattern) along the Street.

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-11To Select an Align Type:1 Click

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-126.1.3.2 Performing Teach AlignmentAfter the Align Type has been selected and the Index has b

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-13To Perform Teach Alignment:1 Cli

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-1410 Select the confidence level for the Model.11 Teach the Model by using the X/Y-Axis Contro

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-156.1.3.3.1 Low Model DetectionAft

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-16spiral search starts from the model situated after the third model. The search ending positi

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-17directional search if needed. If

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTable of ContentsAdvanced Dicing Technologies Ltd.xviiiAppendices _______________________

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-18sharp enough, the user can teach a sub-model (clear model not on the same street), which wil

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-19The low and sub-models are alway

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-20For more information regarding the standard Multi-Panel option, see section 6.5.5.The new op

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-21are added to a recipe as shown i

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-226.1.4.1 Multi-Panel Bar Code IdentificationThe new option “Choice of cutting angle by panel”

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-236.1.5.2 Align Kerf ModelThe Alig

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-24the Processing Method for All Models parameter. This parameter provides the Vision with a ca

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-25For example, in a ceramic applic

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-26coordinate values. The system uses the first and second Cut Verify models to find their Y co

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-27If the new calculated index is w

ADT Model 7100 Semi-Automatic Dicing System Operations ManualList of FiguresP/N 97100-9002-000-14 Ver 06/05xixLIST OF FIGURESFigure 1-1: Model 7100 P

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-286.1.9 Updating the Workpiece AlignmentOnce the workpiece alignment has been taught, and ther

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-29This window refers to a specific

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-30

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCut VerificationP/N 97100-9002-000-14 Ver 06/056.2-16.2 Cut VerificationCut Verification

Cut VerificationAdvanced Dicing Technologies Ltd.6.2-2required cut position and updates the Cut Map created during Alignment. Refer to section 6.1.8 f

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCut VerificationP/N 97100-9002-000-14 Ver 06/056.2-3In case the system fails to detect a

Cut VerificationAdvanced Dicing Technologies Ltd.6.2-4

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-16.3 Kerf CheckingKerf Checking uses the

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-2black/white threshold. The system memorizes the number of checks per cut and the positions, on whic

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-3Kerf Checks are performed at defined in

Advanced Dicing Technologies Ltd.Customer SupportAdvanced Dicing Technologies Ltd.Advanced Technologies CenterHaifa, Israel, 31905Telephone: (+972)-4

ADT Model 7100 Semi-Automatic Dicing System Operations ManualList of FiguresAdvanced Dicing Technologies Ltd.xxFigure 2-8: Water Overflow Message_____

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-4angle. The Kerf Check has to be taught for the second angle before automatic Kerf Checks can be per

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-5The distance between the red lines is t

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-66.3.4.1 Main Workspace WindowThe Main Workspace Window, in the top left corner of the Video Workspa

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-7Double-clicking on the Model displays a

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-8be selected from the main screen by activating the pulldown menu next to the Automatic Kerf Check b

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-93 Add the Activate parameter in Cut Dep

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-10The Teach Kerf-Check procedure is carried out according to the following attributes: Pattern Type

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-11Figure 6-31 below illustrates a user c

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-12including some of the Workpiece beyond the edges of the Kerf, as shown below:7 Set the value for B

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-13• Top Chip Area: The area of all chipp

ADT Model 7100 Semi-Automatic Dicing System Operations ManualList of FiguresP/N 97100-9002-000-14 Ver 06/05xxiFigure 5-14: Angle Tab Popup Menu _____

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-14Figure 6-33) in order to enable the user to set values for each step of the process.This feature w

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-156.3.7.1 AdaptiveThis option is intende

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-16the current cut and not according to the taught one. All the Kerf Check tests are performed on the

ADT Model 7100 Semi-Automatic Dicing System Operations ManualManual Y OffsetP/N 97100-9002-000-14 Ver 06/056.4-16.4 Manual Y OffsetThe Manual Y Offse

Manual Y OffsetAdvanced Dicing Technologies Ltd.6.4-2the center of the Workpiece within which the single cut can be performed.• Define Start Location

ADT Model 7100 Semi-Automatic Dicing System Operations ManualManual Y OffsetP/N 97100-9002-000-14 Ver 06/056.4-36.4.3 Y-Offset Reference PositionsThi

Manual Y OffsetAdvanced Dicing Technologies Ltd.6.4-4• If the previous cut was on the Dress Block, Y-Offset is performed on the Dress Block.• If there

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecial Cut ProceduresP/N 97100-9002-000-14 Ver 06/056.5-16.5 Special Cut ProceduresThis

Special Cut ProceduresAdvanced Dicing Technologies Ltd.6.5-2The cut map and basic parameters for building sub-index recipes are given in section 5.6.

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecial Cut ProceduresP/N 97100-9002-000-14 Ver 06/056.5-33 Define the Last Angle parame

ADT Model 7100 Semi-Automatic Dicing System Operations ManualList of FiguresAdvanced Dicing Technologies Ltd.xxiiFigure 6-24: Kerf Check Workflow ____

Special Cut ProceduresAdvanced Dicing Technologies Ltd.6.5-46.5.4 Chopping"Chopping” is cutting within the substrate, as opposed to the usual cut

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecial Cut ProceduresP/N 97100-9002-000-14 Ver 06/056.5-5This section contains the foll

Special Cut ProceduresAdvanced Dicing Technologies Ltd.6.5-6by the wizard. At the end of teaching process the following message appears:4 Click Yes.Fi

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecial Cut ProceduresP/N 97100-9002-000-14 Ver 06/056.5-76 Click Yes. At this point the

Special Cut ProceduresAdvanced Dicing Technologies Ltd.6.5-8In case one of the alignment models is not found, the System stops the process and an erro

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecial Cut ProceduresP/N 97100-9002-000-14 Ver 06/056.5-96.5.5.2 Multipanel AnimationIn

Special Cut ProceduresAdvanced Dicing Technologies Ltd.6.5-106.5.5.6 Multi-Panel Cutting SequencesThe Multi-Panel cutting sequences can vary depending

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecial Cut ProceduresP/N 97100-9002-000-14 Ver 06/056.5-116.5.6 Cut Depth CompensationW

Special Cut ProceduresAdvanced Dicing Technologies Ltd.6.5-12

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSaw ProceduresP/N 97100-9002-000-14 Ver 06/057-17 SAW PROCEDURESThis chapter includes th

ADT Model 7100 Semi-Automatic Dicing System Operations ManualList of FiguresP/N 97100-9002-000-14 Ver 06/05xxiiiFigure 7-18: 4" Spindle with Coo

Saw ProceduresZ-Axis SafetyAdvanced Dicing Technologies Ltd.7-2To set the Calibration Start Position:1 Manually set the largest blade in use approxima

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade ExpansionP/N 97100-9002-000-14 Ver 06/057.2-17.2 Blade ExpansionThere are three bl

Blade ExpansionAdvanced Dicing Technologies Ltd.7.2-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualHeight ProceduresP/N 97100-9002-000-14 Ver 06/057.3-17.3 Height ProceduresThe Height pro

Height ProceduresAdvanced Dicing Technologies Ltd.7.3-2Process Height can be performed manually at any point during the cutting process. To Manually P

ADT Model 7100 Semi-Automatic Dicing System Operations ManualHeight ProceduresP/N 97100-9002-000-14 Ver 06/057.3-3The user can configure the system t

Height ProceduresAdvanced Dicing Technologies Ltd.7.3-4To Perform Button Height:1 In the Setup & Diagnostics Workbook, select Saw > Dicer >

ADT Model 7100 Semi-Automatic Dicing System Operations ManualHeight ProceduresP/N 97100-9002-000-14 Ver 06/057.3-510 Firmly tighten the upper C-clamp

Height ProceduresAdvanced Dicing Technologies Ltd.7.3-6contact Height, it can only be done when no Workpiece is present on the Cutting Chuck.To Perfor

ADT Model 7100 Semi-Automatic Dicing System Operations ManualHeight ProceduresP/N 97100-9002-000-14 Ver 06/057.3-7Sample Blade Calibration is perform

ADT Model 7100 Semi-Automatic Dicing System Operations ManualList of FiguresAdvanced Dicing Technologies Ltd.xxivFigure 9-17: Spindle Holding Screws _

Height ProceduresAdvanced Dicing Technologies Ltd.7.3-8

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-17.4 Blade HandlingThis chapter describ

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-2The Blade Information screen includes the following sections:• Blade Exposure Chart/Wear Rate Char

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-3• Arrow-shaped cursor - click on a poi

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-4To Display the Wear Rate Chart:• If not already displayed, click Wear rate chart in the center of

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-57.4.1.3 Blade Change TabThe Blade Chan

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-67.4.1.4 Blade Type TabThe Blade Type tab displays the properties for the currently mounted Blade,

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-7• The Measured Diameter is the Blade d

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-8The colors in the Blade Indicator bar indicate the following:Green: Blade exposure satisfactory, c

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-9Securing Nut. This nut is intended for

ADT Model 7100 Semi-Automatic Dicing System Operations ManualList of TablesP/N 97100-9002-000-14 Ver 06/05xxvLIST OF TABLESTable 6-1: Available Mode

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-10To Replace a Blade:1 Initiate the Blade Change procedure in one of the following ways:• Right-cli

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-11The new exposure value is displayed o

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-123 Attach the Spanner Tool onto the Torque Wrench and remove the Holding Nut in the center of the

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-137 Insert the new Blade into the Blade

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-1415 Lock the Middle Securing Nut.16 Close the cutting cover.17 Click Finish. The Blade Information

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-15This process updates the value of Chu

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-167.4.3.2 Building a Dressing RecipeDressing Recipe is a special work program for dressing a new or

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-177.4.3.2.1 Creating a Dressing Program

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-184 Set the After Change Treatment parameter to Dressing.5 Open the Blade properties, double-click

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-197.4.3.3.2 Override ScreenInformation

K&S Model 7100 Semi-Automatic Dicing System Operations ManualList of TablesAdvanced Dicing Technologies Ltd.xxviTable A-22: Model Processing Para

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-207.4.3.3.3 Override Manual StopTo Stop the Override Dressing Process Manually1 Click the Override

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-21Additionally, in the Wafer Type prope

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-22To Display the Dressing Screen:• Click the Dressing button in the toolbar to display the follow

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-237.4.3.4.3 Dressing Manual StopTo Stop

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-24

ADT Model 7100 Semi-Automatic Dicing System Operations ManualChuck ChangeP/N 97100-9002-000-14 Ver 06/057.5-17.5 Chuck ChangeThe Model 7100 can use v

Chuck ChangeAdvanced Dicing Technologies Ltd.7.5-24 Follow the Wizard instructions. Click Next to install a new chuck or Finish to leave the current c

ADT Model 7100 Semi-Automatic Dicing System Operations ManualChuck ChangeP/N 97100-9002-000-14 Ver 06/057.5-3To replace a Thick chuck with a Thin one

Chuck ChangeAdvanced Dicing Technologies Ltd.7.5-46 Click on the field name Autofocus on Dicer Chuck to display the Teach button.7 Click Teach.8 Click

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecial FeaturesP/N 97100-9002-000-14 Ver 06/058-18 SPECIAL FEATURESThis chapter describ

ADT Model 7100 Semi-Automatic Dicing System Operations ManualP/N 97100-9002-000-14 Ver 06/051-11 INTRODUCTIONThe Model 7100 Series is a semi-automati

Special FeaturesAdvanced Dicing Technologies Ltd.8-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLoad MonitoringP/N 97100-9002-000-14 Ver 06/058.1-18.1 Load MonitoringThe Load Monitor c

Load MonitoringAdvanced Dicing Technologies Ltd.8.1-2The Load Monitor Workspace is divided into two graphs, the top measuring the Average Value per Cu

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLoad MonitoringP/N 97100-9002-000-14 Ver 06/058.1-38.1.2.2 Raw DataThe Raw Data graph il

Load MonitoringAdvanced Dicing Technologies Ltd.8.1-48.1.2.4 Load Monitor Baseline ParametersThe Baseline is the load of the Spindle when the blade is

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLoad MonitoringP/N 97100-9002-000-14 Ver 06/058.1-5To Access the Load Monitor Control Sc

Load MonitoringAdvanced Dicing Technologies Ltd.8.1-6

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLanguage SelectionP/N 97100-9002-000-14 Ver 06/058.2-18.2 Language SelectionThe Model 71

Language SelectionAdvanced Dicing Technologies Ltd.8.2-2The active language is displayed in the Setup and Diagnostic workspace in both English and the

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWafer Vacuum CheckP/N 97100-9002-000-14 Ver 06/058.3-18.3 Wafer Vacuum CheckDuring initi

IntroductionAdvanced Dicing Technologies Ltd.1-21.2 Standard Features The Model 7100 Series includes the following features:• Single Head dicing machi

Wafer Vacuum CheckAdvanced Dicing Technologies Ltd.8.3-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualOpen Loop Theta Accuracy ProceduresP/N 97100-9002-000-14 Ver 06/058.4-18.4 Open Loop The

Open Loop Theta Accuracy ProceduresAdvanced Dicing Technologies Ltd.8.4-2performing the Stress Release. The default value for this parameter is 3.8.4.

ADT Model 7100 Semi-Automatic Dicing System Operations ManualOpen Loop Theta Accuracy ProceduresP/N 97100-9002-000-14 Ver 06/058.4-3changed angles, t

Open Loop Theta Accuracy ProceduresAdvanced Dicing Technologies Ltd.8.4-4

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpindle VelocityP/N 97100-9002-000-14 Ver 06/058.5-18.5 Spindle VelocityThe speed of the

Spindle VelocityAdvanced Dicing Technologies Ltd.8.5-28.5.2 Reduced Vision Spindle VelocityThis feature allows the user to set a different spindle spe

ADT Model 7100 Semi-Automatic Dicing System Operations ManualFocus Change (Initial Focus Position)P/N 97100-9002-000-14 Ver 06/058.6-18.6 Focus Chang

Focus Change (Initial Focus Position)Advanced Dicing Technologies Ltd.8.6-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualManual Inspection IlluminationP/N 97100-9002-000-14 Ver 06/058.7-18.7 Manual Inspection

ADT Model 7100 Semi-Automatic Dicing System Operations ManualP/N 97100-9002-000-14 Ver 06/051-3• Exhibition Mode: This mode is intended for exhibitio

Manual Inspection IlluminationAdvanced Dicing Technologies Ltd.8.7-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDatabase BackupP/N 97100-9002-000-14 Ver 06/058.8-18.8 Database BackupThe system can be

Database BackupAdvanced Dicing Technologies Ltd.8.8-24 To perform the backup on a CD-RW, type the CD-RW drive (for example: E:\) in the Value line. If

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTheta Safety Limits on X-AxisP/N 97100-9002-000-14 Ver 06/058.9-18.9 Theta Safety Limits

Theta Safety Limits on X-AxisAdvanced Dicing Technologies Ltd.8.9-2The axX values define the Right (see Figure 8-12) and Left (see Figure 8-13) X-limi

ADT Model 7100 Semi-Automatic Dicing System Operations ManualChange of Length Unit TypeP/N 97100-9002-000-14 Ver 06/058.10-18.10 Change of Length Uni

Change of Length Unit TypeAdvanced Dicing Technologies Ltd.8.10-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualMulti-Panel Bar CodeP/N 97100-9002-000-14 Ver 06/058.11-18.11 Multi-Panel Bar CodeThe Ba

Multi-Panel Bar CodeAdvanced Dicing Technologies Ltd.8.11-28.11.2 Using the Bar Code ReaderWhile performing an Auto-Run operation or Wafer-Cut operati

ADT Model 7100 Semi-Automatic Dicing System Operations ManualConfiguration OptionsP/N 97100-9002-000-14 Ver 06/059-19 CONFIGURATION OPTIONSThis Chapt

ADT Model 7100 Semi-Automatic Dicing System Operations ManualRecord of ChangesP/N 97100-9002-000-14 Ver 06/05iiiRECORD OF CHANGESItem New Part Number

IntroductionAdvanced Dicing Technologies Ltd.1-4

Configuration OptionsAdvanced Dicing Technologies Ltd.9-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-19.1 AutoloaderThe Autoloader option has be

AutoloaderAdvanced Dicing Technologies Ltd.9.1-2The Autoloader consists of the following components:• Mechanical Modules• Linear Arm (X Axis)• Elevato

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-3Linear Arm moves into position, the Upper

AutoloaderAdvanced Dicing Technologies Ltd.9.1-4Most Autoloader features are implemented in two dedicated Workbooks: MHS (see section 9.1.2.2), which

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-59.1.2.1 CassComp WorkbookSelect CassComp f

AutoloaderAdvanced Dicing Technologies Ltd.9.1-69.1.2.1.1 AxesThe Axes subsection of the CassComp section of the Setup & Diagnostics tree includes

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-7In the lower right pane (identical for Ele

AutoloaderAdvanced Dicing Technologies Ltd.9.1-8• Slow acceleration • Deceleration • Kill deceleration • Self test delay • LU - Finger Load/Unload sta

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-99.1.2.1.2 Cassette1Select Cassette1 from t

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAvailable ModelsP/N 97100-9002-000-14 Ver 06/051.6-11.6 Available ModelsSeveral configura

AutoloaderAdvanced Dicing Technologies Ltd.9.1-10Select MHS from the Setup & Diagnostics tree to display the following: In the upper left pane of

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-11• Initiate the MHS: Click MHS Init to in

AutoloaderAdvanced Dicing Technologies Ltd.9.1-12• LU Dicer - the Linear Arm Load/Unload position coordinate for the Dicer station• LU Prealign - the

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-139.1.3.1.2 Manual Loading/Unloading from t

AutoloaderAdvanced Dicing Technologies Ltd.9.1-149.1.3.1.3 Manual Loading/Unloading a WorkpieceTo Manually Load a Workpiece:Press Ctrl+L to neutralize

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-159.1.3.2 Running the Model 7100 with the A

AutoloaderAdvanced Dicing Technologies Ltd.9.1-169.1.3.3 Loading Cassettes to the AutoloaderBefore the Autoloader can be operated, you must load a Cas

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-17The system notifies the user by • Display

AutoloaderAdvanced Dicing Technologies Ltd.9.1-189.1.3.5.2 Recovery After a Severe System FailureA severe failure, such as the loss of air or water pr

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTilted SpindleP/N 97100-9002-000-14 Ver 06/059.2-19.2 Tilted SpindleThis option enables

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAvailable ModelsAdvanced Dicing Technologies Ltd.1.6-2Models/ Features Vectus (2") P

Tilted SpindleAdvanced Dicing Technologies Ltd.9.2-29.2.1 Changing the Spindle Angle in a RecipeOnce the Spindle Angle is changed in the Setup screen,

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTilted SpindleP/N 97100-9002-000-14 Ver 06/059.2-39.2.3 Changing the Spindle AngleChangi

Tilted SpindleAdvanced Dicing Technologies Ltd.9.2-44 Click Save.5 In the wizard click Finish. The dicer moves to the Change station. The following me

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTilted SpindleP/N 97100-9002-000-14 Ver 06/059.2-58 Secure the Spindle holding screws.9

Tilted SpindleAdvanced Dicing Technologies Ltd.9.2-6If one of the sensors detects that the Spindle or the Camera is at a wrong angle, no angle indicat

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTilted SpindleP/N 97100-9002-000-14 Ver 06/059.2-75 In the wizard click Finish. The foll

Tilted SpindleAdvanced Dicing Technologies Ltd.9.2-8To Adjust the Spindle Angle1 Release the three spindle holding screws.2 Release the Spindle upper

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTilted SpindleP/N 97100-9002-000-14 Ver 06/059.2-93 Update this parameter value accordin

Tilted SpindleAdvanced Dicing Technologies Ltd.9.2-109.2.4.4.4 Sample Blade CalibrationTo Perform Sample Blade Calibration1Open the Blade screen.2 Ent

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDress StationP/N 97100-9002-000-14 Ver 06/059.3-19.3 Dress StationThe Dress Station is i

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAvailable ModelsP/N 97100-9002-000-14 Ver 06/051.6-3Additional Models: Tilted Spindle, Au

Dress StationAdvanced Dicing Technologies Ltd.9.3-22 In the Menu Bar click User > Configuration. Configuration screen appears.3 Set the Dress Stati

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDress StationP/N 97100-9002-000-14 Ver 06/059.3-3The new Dress Station position paramete

Dress StationAdvanced Dicing Technologies Ltd.9.3-4Once the Change Dress Block procedure is started, follow the Wizard instructions. Perform the follo

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDress StationP/N 97100-9002-000-14 Ver 06/059.3-5To Teach the Dressing Block Lower-left

Dress StationAdvanced Dicing Technologies Ltd.9.3-6For more information about specific parameters, see Table 9-1.9.3.4 Dressing ModesThe dressing mode

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDress StationP/N 97100-9002-000-14 Ver 06/059.3-7The blade dressing on a Dressing Block

Dress StationAdvanced Dicing Technologies Ltd.9.3-89.3.4.3 Dressing Block Cut MappingOnce the Dressing parameters (see section 9.3.4.1 and section 9.3

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWash PipeP/N 97100-9002-000-14 Ver 06/059.4-19.4 Wash PipeThe Wash Pipe is an optional f

Wash PipeAdvanced Dicing Technologies Ltd.9.4-2The washing mechanism is based on the Wash Pipe and a toggle move of the X axis between the two points

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWash PipeP/N 97100-9002-000-14 Ver 06/059.4-3To Activate the Wash Pipe1 Click User >

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAvailable ModelsAdvanced Dicing Technologies Ltd.1.6-4

Wash PipeAdvanced Dicing Technologies Ltd.9.4-49.4.2 Model 7100 Vectus and ProVectusThe Model 7100 Vectus/ProVectus standard configuration uses the st

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWash PipeP/N 97100-9002-000-14 Ver 06/059.4-59.4.3 Model 7100 Fortis and ProFortisThe op

Wash PipeAdvanced Dicing Technologies Ltd.9.4-6

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTroubleshootingP/N 97100-9002-000-14 Ver 06/0510-110 TROUBLESHOOTINGThe Model 7100 provi

TroubleshootingAdvanced Dicing Technologies Ltd.10-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualError Message InformationP/N 97100-9002-000-14 Ver 06/0510.1-110.1 Error Message Informa

Error Message InformationAdvanced Dicing Technologies Ltd.10.1-2The Error Messages Browser, located at the bottom of the error message window, is usef

ADT Model 7100 Semi-Automatic Dicing System Operations ManualRecipe ProblemsP/N 97100-9002-000-14 Ver 06/0510.2-110.2 Recipe ProblemsIf the system re

Recipe ProblemsAdvanced Dicing Technologies Ltd.10.2-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualInitializing the SystemP/N 97100-9002-000-14 Ver 06/0510.3-110.3 Initializing the System

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSystem DescriptionP/N 97100-9002-000-14 Ver 06/052-12 SYSTEM DESCRIPTIONThis chapter des

Initializing the SystemAdvanced Dicing Technologies Ltd.10.3-23 From the Setup & Diagnostics tree, select Saw > Dicer to display the following:

ADT Model 7100 Semi-Automatic Dicing System Operations ManualHeight ProblemP/N 97100-9002-000-14 Ver 06/0510.4-110.4 Height ProblemIf there is a prob

Height ProblemAdvanced Dicing Technologies Ltd.10.4-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDatabase Restoration and PC RecoveryP/N 97100-9002-000-14 Ver 06/0510.5-110.5 Database R

Database Restoration and PC RecoveryAdvanced Dicing Technologies Ltd.10.5-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCamera Installation After Emergency StopP/N 97100-9002-000-14 Ver 06/0510.6-110.6 Camera

Camera Installation After Emergency StopAdvanced Dicing Technologies Ltd.10.6-24In the Device Manager, double-click Imaging Devices. 5Right-click on 1

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCamera Installation After Emergency StopP/N 97100-9002-000-14 Ver 06/0510.6-39Select Har

Camera Installation After Emergency StopAdvanced Dicing Technologies Ltd.10.6-411 Click Next. Hardware Installation dialog box appears.12 Click Contin

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCamera Installation After Emergency StopP/N 97100-9002-000-14 Ver 06/0510.6-5Once the in

System DescriptionAdvanced Dicing Technologies Ltd.2-2

Camera Installation After Emergency StopAdvanced Dicing Technologies Ltd.10.6-6

ADT Model 7100 Semi-Automatic Dicing System Operations ManualIf Nothing HelpsP/N 97100-9002-000-14 Ver 06/0510.7-110.7 If Nothing HelpsAs in most com

If Nothing HelpsAdvanced Dicing Technologies Ltd.10.7-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualUPS BypassP/N 97100-9002-000-14 Ver 06/0510.8-110.8 UPS BypassThe following procedure co

UPS BypassAdvanced Dicing Technologies Ltd.10.8-28 In the Services screen, mark PowerMon II and click Stop (see Figure 10-4). The status changes from

ADT Model 7100 Semi-Automatic Dicing System Operations ManualUPS BypassP/N 97100-9002-000-14 Ver 06/0510.8-311 Click OK.12 Click the Dicing System ic

UPS BypassAdvanced Dicing Technologies Ltd.10.8-4

ADT Model 7100 Semi-Automatic Dicing System Operations ManualThe Model 7100 GlossaryP/N 97100-9002-000-14 Ver 06/05A-1A APPENDICESThis chapter includ

The Model 7100 GlossaryAdvanced Dicing Technologies Ltd.A-2The characteristics of a particular Blade.BlockA series of cuts which are defined in a reci

ADT Model 7100 Semi-Automatic Dicing System Operations ManualP/N 97100-9002-000-14 Ver 06/05A-3(plural: Dice)That portion of a Workpiece which has be

ADT Model 7100 Semi-Automatic Dicing System Operations ManualMain SubsystemsP/N 97100-9002-000-14 Ver 06/052.1-12.1 Main Subsystems2.1.1 Front PanelT

The Model 7100 GlossaryAdvanced Dicing Technologies Ltd.A-43 Non-Contact Height Secondary Device detects if the beam is obstructed by the Blade.4 Chuc

ADT Model 7100 Semi-Automatic Dicing System Operations ManualP/N 97100-9002-000-14 Ver 06/05A-5MixedThe workpiece is cut in both directions, i.e. it

The Model 7100 GlossaryAdvanced Dicing Technologies Ltd.A-6SupplierADT production personnel, field engineers and customer support personnel.TableRotat

ADT Model 7100 Semi-Automatic Dicing System Operations ManualP/N 97100-9002-000-14 Ver 06/05A-7X-AxisX-Axis components move left and right. See also

AlgorithmsCut AlgorithmsAdvanced Dicing Technologies Ltd.A-8Appendix 2: AlgorithmsThe Model 7100 software contains the algorithms described in the fol

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAlign AlgorithmsP/N 97100-9002-000-14 Ver 06/05A-9to cut regular round or rectangular Wo

AlgorithmsKerf Check AlgorithmAdvanced Dicing Technologies Ltd.A-10Alignment to be performed, the Align Type parameter must be specified as Dress Manu

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf Check Teach AlgorithmP/N 97100-9002-000-14 Ver 06/05A-11• Type• Wafer Mounting Angl

Recipe ParametersAir ParametersAdvanced Dicing Technologies Ltd.A-12Appendix 3: Recipe ParametersThe Model 7100 software contains the parameters descr

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAlign ParametersP/N 97100-9002-000-14 Ver 06/05A-13Align ParametersTable A-2 lists the A

Main SubsystemsAdvanced Dicing Technologies Ltd.2.1-2The ON button powers on the Components and the PC, which then starts loading the software. When t

Recipe ParametersAlign ParametersAdvanced Dicing Technologies Ltd.A-14Align Index ToleranceThe permitted variation between the index found during Alig

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAlign ParametersP/N 97100-9002-000-14 Ver 06/05A-15AlignMain Model High Score (%)The thr

Recipe ParametersAlign ParametersAdvanced Dicing Technologies Ltd.A-16AlignSpiral-Index Search Width (Y)The width of the spiral search area outside th

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAlign ParametersP/N 97100-9002-000-14 Ver 06/05A-17Align TypeThe way Auto Alignment is p

Recipe ParametersAlign Kerf Model ParametersAdvanced Dicing Technologies Ltd.A-18Align Kerf Model ParametersTable A-3 lists the parameters in the Alig

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAuto Height CompensationP/N 97100-9002-000-14 Ver 06/05A-19* These parameters are availa

Recipe ParametersAverage Index ParametersAdvanced Dicing Technologies Ltd.A-20Average Index ParametersTable A-5 lists the parameters in the Average In

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBar Code ParametersP/N 97100-9002-000-14 Ver 06/05A-21Bar Code ParametersTable A-6 lists

Recipe ParametersBlade ParametersAdvanced Dicing Technologies Ltd.A-22Blade ParametersTable A-7 lists the Blade parameters. Blade parameters are used

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCut Depth CompP/N 97100-9002-000-14 Ver 06/05A-23Cut Depth CompTable A-8 lists the Cut D

ADT Model 7100 Semi-Automatic Dicing System Operations ManualMain SubsystemsP/N 97100-9002-000-14 Ver 06/052.1-3In systems with Autoloader, the Stop

Recipe ParametersCut ParametersAdvanced Dicing Technologies Ltd.A-24Cut ParametersTable A-9 lists the parameters in the Cut category. Cut parameters d

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCut ParametersP/N 97100-9002-000-14 Ver 06/05A-25CutCut Map Build DirectionDefines the d

Recipe ParametersCut ParametersAdvanced Dicing Technologies Ltd.A-26Cut Entry OvercutThe distance for which the entry speed is maintained to ensure th

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCut ParametersP/N 97100-9002-000-14 Ver 06/05A-27Cut OvertravelThe distance along the X-

Recipe ParametersCut Verify ParametersAdvanced Dicing Technologies Ltd.A-28The following diagram illustrates the velocity and travel of the X-Axis dur

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCut Verify ParametersP/N 97100-9002-000-14 Ver 06/05A-29Cut Verify Number of ModelsEnabl

Recipe ParametersCut Verify Limit ParametersAdvanced Dicing Technologies Ltd.A-30Cut Verify Limit ParametersTable A-11 lists the Cut Verify Limit para

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDiagnostisc ParametersP/N 97100-9002-000-14 Ver 06/05A-31Diagnostisc ParametersTable A-1

Recipe ParametersDress Block ParametersAdvanced Dicing Technologies Ltd.A-32Dress Block ParametersTable A-14 lists the parameters in the Dress Block c

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDress Block ParametersP/N 97100-9002-000-14 Ver 06/05A-33Dress Block Dress/Chop DepthCut

Safety FirstAdvanced Dicing Technologies Ltd.ivSAFETY FIRSTAdvanced Dicing Technologies Ltd. believes that the safety of personnel working with and ar

Main SubsystemsAdvanced Dicing Technologies Ltd.2.1-4• The AC Input light is lit to indicate presence of AC power in the System.• The 24 VDC light is

Recipe ParametersHeight ParametersAdvanced Dicing Technologies Ltd.A-34Height ParametersTable A-15 lists the parameters in the Height category. Height

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf Check ParametersP/N 97100-9002-000-14 Ver 06/05A-35Kerf Check ParametersTable A-16

Recipe ParametersKerf Check ParametersAdvanced Dicing Technologies Ltd.A-36Kerf Check Last Cut No.The Street where Kerf Checking ends. Possible Values

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf Check Limit ParametersP/N 97100-9002-000-14 Ver 06/05A-37Kerf Check Limit Parameter

Recipe ParametersKerf Check Limit ParametersAdvanced Dicing Technologies Ltd.A-38Kerf Check LimitHead1 Center-To-Max ChipThe maximum distance permitte

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLoad Monitor Cutting ParametersP/N 97100-9002-000-14 Ver 06/05A-39Load Monitor Cutting P

Recipe ParametersLoop Cut ParametersAdvanced Dicing Technologies Ltd.A-40Loop Cut ParametersTable A-20 lists the parameters in the Loop Cut category.

ADT Model 7100 Semi-Automatic Dicing System Operations ManualManual Inspection ParametersP/N 97100-9002-000-14 Ver 06/05A-41Manual InspectionCoaxial

Recipe ParametersModel Precessing ParametersAdvanced Dicing Technologies Ltd.A-42Model Precessing ParametersTable A-22 lists the parameters in the Mod

ADT Model 7100 Semi-Automatic Dicing System Operations ManualMHS ParametersP/N 97100-9002-000-14 Ver 06/05A-43MHS ParametersTable A-23 lists the para

ADT Model 7100 Semi-Automatic Dicing System Operations ManualMain SubsystemsP/N 97100-9002-000-14 Ver 06/052.1-52.1.2.1 Vision SystemThe Model 7100 S

Recipe ParametersShrinkage ParametersAdvanced Dicing Technologies Ltd.A-44Shrinkage ParametersTable A-26 lists the parameters in the Rotational Shrink

ADT Model 7100 Semi-Automatic Dicing System Operations ManualShrinkage ParametersP/N 97100-9002-000-14 Ver 06/05A-45ShrinkageAlign Correction Verific

Recipe ParametersTeach Center ParametersAdvanced Dicing Technologies Ltd.A-46Teach Center ParametersTable A-27 lists the parameters in Teach Center ca

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTilted Spindle ParametersP/N 97100-9002-000-14 Ver 06/05A-47Tilted Spindle ParametersTab

Recipe ParametersY Offset ParametersAdvanced Dicing Technologies Ltd.A-48Y Offset ParametersTable A-30 lists the parameters in the Y Offset category.

ADT Model 7100 Semi-Automatic Dicing System Operations ManualY Offset ParametersP/N 97100-9002-000-14 Ver 06/05A-49Y OffsetY Offset After Blade Chang

Recipe ParametersY Offset ParametersAdvanced Dicing Technologies Ltd.A-50

ADT Model 7100 Semi-Automatic Dicing System Operations ManualIndexP/N 97100-9002-000-14 Ver 06/05Index-iINDEXAAccess Levels, 4-1, A-1Administrator, A

IndexAdvanced Dicing Technologies Ltd.Index-iiHubless, A-4Indicators, 2.2-10, 7.4-7Information, 7.4-1Wear, 7.4-2Blade Angle Factor, A-23Blade Change,

ADT Model 7100 Semi-Automatic Dicing System Operations ManualIndexP/N 97100-9002-000-14 Ver 06/05Index-iiiDie Model, 6.1-22, A-3Display Controls, 2.2

Main SubsystemsAdvanced Dicing Technologies Ltd.2.1-6• Coaxial: Vertical illumination passing through the Microscope, generally used on silicon Workpi

IndexAdvanced Dicing Technologies Ltd.Index-ivHelp Menu, 2.2-5High AVG Limit, A-39IIllumination, 2.1-5coaxial, 2.1-6oblique, 2.1-6Oblique (Ring), 2.2-

ADT Model 7100 Semi-Automatic Dicing System Operations ManualIndexP/N 97100-9002-000-14 Ver 06/05Index-vFirst Cut No. Parameter, A-41Focus on Kerf St

IndexAdvanced Dicing Technologies Ltd.Index-viPParameters, A-12access, 4.2-1adding, 4.2-2, 5.4-8categories, 5.4-2defining, 5.4-8deleting, 4.2-2, 5.4-1

ADT Model 7100 Semi-Automatic Dicing System Operations ManualIndexP/N 97100-9002-000-14 Ver 06/05Index-viiTheta Safety Limits on X-Axis, 8.9-1Theta T

IndexAdvanced Dicing Technologies Ltd.Index-viiiY Offset Parameters, A-48Y Offset Reference Position Parameter, A-49Y Offset, reference position, 6.4-

ADT Model 7100 Semi-Automatic Dicing System Operations ManualMain SubsystemsP/N 97100-9002-000-14 Ver 06/052.1-72.1.3.1 Stand-alone Buzzer on Light T

Main SubsystemsAdvanced Dicing Technologies Ltd.2.1-8a. Open the main workspace Configuration screen.b. In the value column, next to the parameter Dig

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-12.2 Graphical User Interface

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-22.2.1 Menu BarThe menu bar in the main window contains seven menus, described on the fol

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-32.2.1.3 Load Monitor MenuThe

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-42.2.1.5 Maintenance MenuThe Maintenance menu contains the following menu options:Blade T

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-52.2.1.6 Help MenuThe Help me

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSafety FirstP/N 97100-9002-000-14 Ver 06/05vSafety FeaturesOur Systems are equipped with

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-62.2.2.1 Additional Tools - Main & Video WorkspaceIn the Main Workspace and Video Wor

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-72.2.2.2 Additional Tools - P

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-82.2.2.3 Additional Tools - Workbook WorkspaceIn the Workbook Workspace, the toolbar cont

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-92.2.3.4 Wafer Holder GaugeWa

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-102.2.5 Active User FieldThe Active User field displays the current recipe file name assi

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-112.2.8 Run ButtonThe Run But

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-12If the Stop button is clicked, while the system is in Auto Run mode, the system finishe

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-13• Video Workspace: Displays

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-142.2.10.1 Main WorkspaceThe Main Workspace is automatically displayed when the software

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-152.2.10.1.1 Top View AreaThe

Safety FirstAdvanced Dicing Technologies Ltd.vidisplayed if the Spindle Cover is opened while an Axis is moving or when a bypass key is used. The Axes

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-16• Show Z view: Toggles the display of the Side View area (see section 2.2.10.1.2).• Sho

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-172.2.10.1.2 Side View AreaTh

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-182.2.10.2 Video WorkspaceThe Video Workspace is selected by clicking in the main windo

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-19In other operation modes, t

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-20ReticleThe Reticle consists of green crosshairs that are used to pinpoint a location on

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-21Clicking on an axis button

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-22Double-clicking any point in the FOV bring the FOV center to that point. Center-clickin

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-232.2.10.2.3 Zoom ControlsDig

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-24After configuring the Zoom option, magnification can be set in the Video Workspace by u

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-25• Clicking the “ticker” up

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSafety FirstP/N 97100-9002-000-14 Ver 06/05viiThe Load/Unload Interlock can be locked an

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-26WizardThe Wizard tab displays step-by-step instructions for carrying out a selected pro

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-27ModelAfter the Teach proced

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-28The colors of the Indexes on the Cut Map reflect the following:• Yellow (blinking): The

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-292.2.10.3 Programming Worksp

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-30parameters for that category on the right of the Programming Workspace, as follows:Para

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-31There are three workbooks,

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-32Overflow SensorIn the Setup & Diagnostics tree, under Saw, the Overflow sensor is d

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-332.2.10.4.2 Calibration Work

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-34SensorsThe following sensors are listed under Sensor Calibration (see Figure 2-10):• Ma

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-352.2.10.5 Load Monitor Works

Before You BeginAdvanced Dicing Technologies Ltd.viiiBEFORE YOU BEGINThis ManualBefore you begin to work with the 7100 Dicing Series machine, please r

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-36Figure 2-12: Dressing WorkspaceFigure 2-13: Override Workspace

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-37The Blade Info/Override/Dre

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-38

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSystem ConfigurationP/N 97100-9002-000-14 Ver 06/052.3-12.3 System ConfigurationThe Conf

System ConfigurationAdvanced Dicing Technologies Ltd.2.3-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualMenu Navigation ChartP/N 97100-9002-000-14 Ver 06/052.4-12.4 Menu Navigation Chart

Menu Navigation ChartAdvanced Dicing Technologies Ltd.2.4-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSystem OperationP/N 97100-9002-000-14 Ver 06/053-13 SYSTEM OPERATIONThis chapter describ

System OperationAdvanced Dicing Technologies Ltd.3-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualPowering Up/Down ProceduresP/N 97100-9002-000-14 Ver 06/053.1-13.1 Powering Up/Down Proc

ADT Model 7100 Semi-Automatic Dicing System Operations ManualContents at a GlanceP/N 97100-9002-000-14 Ver 06/05ixContents at a GlanceChapter 1: Intr

Powering Up/Down ProceduresAdvanced Dicing Technologies Ltd.3.1-2Restore dialog window that appears on the monitor screen after an abnormal shut down:

ADT Model 7100 Semi-Automatic Dicing System Operations ManualPowering Up/Down ProceduresP/N 97100-9002-000-14 Ver 06/053.1-33.1.2 Powering Down the S

Powering Up/Down ProceduresAdvanced Dicing Technologies Ltd.3.1-4

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLogging InP/N 97100-9002-000-14 Ver 06/053.2-13.2 Logging InWhen the Model 7100 software

Logging InAdvanced Dicing Technologies Ltd.3.2-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSystem InitializationP/N 97100-9002-000-14 Ver 06/053.3-13.3 System InitializationOnce t

System InitializationAdvanced Dicing Technologies Ltd.3.3-2

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDefining the JobP/N 97100-9002-000-14 Ver 06/053.4-13.4 Defining the JobDefining the job

Defining the JobAdvanced Dicing Technologies Ltd.3.4-2To Assign a Recipe From the Setup & Diagnostics Workbook:1 Click in the toolbar to display

ADT Model 7100 Semi-Automatic Dicing System Operations ManualPlacing/Removing a WorkpieceP/N 97100-9002-000-14 Ver 06/053.5-13.5 Placing/Removing a W