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Installation Guide
Axis 7100 Installation Guide Page 278
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Language Selection
Advanced Dicing Technologies Ltd
.
8.2-2
The active language is displayed in th
e Setup and Diagnostic workspace in
both English and the loca
l language (see
Figure 8-6
)
Figure 8-6: Simplified Chi
nese GUI
1
2
...
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423
424
ADT 7100
1
RECORD OF CHANGES
3
SAFETY FIRST
4
Safety Features
5
Safety First
6
BEFORE YOU BEGIN
8
Contents at a Glance
9
Reference Documents
10
CONVENTIONS
11
Abbreviations and Acronyms
12
TABLE OF CONTENTS
13
_______________________6.4-1
15
LIST OF FIGURES
19
List of Figures
20
LIST OF TABLES
25
List of Tables
26
1 INTRODUCTION
27
1.2 Standard Features
28
1.3 Modes of Operation
28
1.4 Available Models
29
1.5 Options
29
Introduction
30
1.6 Available Models
31
Available Models
32
2 SYSTEM DESCRIPTION
35
System Description
36
2.1 Main Subsystems
37
2.1.1.3 Power Lights
39
2.1.2 Dicer
40
2.1.2.1 Vision System
41
2.1.2.1.2 Illumination
41
2.1.3 Light Tower
42
Main Subsystems
44
2.2 Graphical User Interface
45
2.2.1 Menu Bar
46
2.2.1.3 Load Monitor Menu
47
2.2.1.4 Manual Menu
47
2.2.1.5 Maintenance Menu
48
2.2.2 Toolbar
49
Graphical User Interface
50
2.2.3 Gauges
52
2.2.4 Dicer Status Indicator
53
2.2.5 Active User Field
54
2.2.6 Activity Log
54
2.2.7 Blade Indicator
54
2.2.8 Run Button
55
2.2.9 Stop Button
55
2.2.10 Workspaces
56
2.2.10.1 Main Workspace
58
2.2.10.1.1 Top View Area
59
1 Upper Limit
60
2 Lower Limit
60
2.2.10.1.2 Side View Area
61
2.2.10.2 Video Workspace
62
2.2.10.2.2 Display Controls
64
2.2.10.2.3 Zoom Controls
67
To Enable the Zoom Option:
67
To Use Digital Magnification:
68
2.2.10.2.5 Wizard/Model Area
69
2.2.10.2.7 Other Buttons
72
2.2.10.4 Workbook Workspace
74
2.3 System Configuration
83
System Configuration
84
2.4 Menu Navigation Chart
85
Menu Navigation Chart
86
3 SYSTEM OPERATION
87
System Operation
88
3.1.1 Powering Up the System
89
Powering Up/Down Procedures
90
To Power Down the System:
91
3.1.2.1 Lockout/Tagout
91
3.2 Logging In
93
Logging In
94
3.3 System Initialization
95
System Initialization
96
3.4 Defining the Job
97
Defining the Job
98
Placing/Removing a Workpiece
100
3.6 Model 7100 Workflows
101
Model 7100 Workflows
103
3.6.3 Manual Mode Workflow
105
3.6.4.4 Teaching the Index
106
3.6.4.1 Defining Jobs
106
3.6.4.1.1 Assigning Recipes
106
3.6.4.3 Teaching Alignment
106
3.6.4.5 Manual Alignment
107
3.6.4.6 Blade Changing
107
3.6.4.7 Manual Y Offset
107
3.7 Stopping System Operation
109
3.7.3 Pausing a Process
110
3.7.4 Manual Stop
110
3.8 Log File
111
3.8.1 Applying Log Filters
112
3.8.2 Log File Find Feature
112
3.8.3 Exporting Log Files
113
3.8.4 Periodical backup
113
Log File
114
4 ADMINISTRATION
115
Administration
116
4.1 Access Levels
117
Access Levels
118
4.2 Modifying Access Levels
119
4.2.2 User Interface Elements
120
Modifying Access Levels
121
4.2.3 Protected Mode
123
4.3 Adding and Removing Users
125
Adding and Removing Users
126
5 BUILDING RECIPES
127
Create a New Recipe
129
Define Recipe
129
Properties
129
Specify Recipe
129
Parameters
129
Building Recipes Workflow
130
5.2 Creating a New Recipe
131
Creating a New Recipe
132
Defining Recipe Properties
133
To Define Recipe Properties:
134
To Change Blades:
138
5.3.2.2 Defining New Blades
138
To Define a new blade:
139
To Modify Blade Properties:
139
5.3.2.4 Deleting Blades
140
To delete a blade:
140
5.4.1 Accessing Parameters
141
Specifying Recipe Parameters
142
To Display Recipe Parameters:
144
5.4.3.1 Defining Angles
145
5.4.3.1.1 Adding New Angles
145
Workpiece
145
Angle 90
145
To Define New Angles:
146
5.4.3.1.2 Moving Angle Tabs
146
5.4.3.1.3 Modifying Angles
147
To Modify Angles:
147
5.4.3.1.4 Angle Access Rights
148
5.4.3.2 Specifying Parameters
148
5.4.3.2.1 Adding Parameters
148
To Modify Parameter Values:
150
5.4.3.2.3 Deleting Parameters
150
To Export a Recipe:
151
To Import a Recipe:
152
5.6 Recipe Templates
155
5.6.2 APC Loop Cut Template
156
5.6.3 GPC Standard Template
157
Recipe Templates
158
5.6.6 GPC Dressing Template
160
6 DICER PROCEDURES
161
Dicer Procedures
162
6.1 Workpiece Alignment
163
6.1.1 Manual Alignment
164
6.1.1.2 Defining Cut Position
165
6.1.2 Auto Alignment
166
6.1.2.1 Teach Index
167
To Teach the Index:
167
Workpiece Alignment
168
To Teach the Index Manually:
170
Move manually
171
Street Dice
171
Cut position
171
Align Index
172
To Select an Align Type:
173
To Perform Teach Alignment:
175
• Low Model Detection
176
• Main Model Detection
176
6.1.3.3.1 Low Model Detection
177
Figure 6-18
183
6.1.5 Model Types
184
6.1.5.2 Align Kerf Model
185
6.1.7 Rotational Shrinkage
187
6.1.8 Average Index
188
6.2 Cut Verification
193
Cut Verification
194
6.2.2 Auto Cut Verification
195
6.3 Kerf Checking
197
6.3.3 Kerf Check Workflow
198
Kerf Checking
199
6.3.4 Automatic Kerf Checking
200
6.3.4.1 Main Workspace Window
202
6.3.5 Manual Kerf Check
203
6.3.6 Teach Kerf Check
205
To Teach the Kerf Check:
207
Figure 6-32: Teach Kerf Check
208
6.3.7 Kerf Check Options
209
6.3.7.1 Adaptive
211
6.3.7.2 Advanced
211
6.3.7.3 Adaptive Only
211
6.3.7.4 Advanced Only
212
6.3.7.5 Upper Bar
212
6.3.7.6 Lower Bar
212
6.4 Manual Y Offset
213
To Perform Manual Y Offset:
214
6.4.4 Y-Offset on Dress Block
215
Cutting Location parameter
216
6.5 Special Cut Procedures
217
6.5.3 Loop Cut
218
Special Cut Procedures
219
6.5.4 Chopping
220
6.5.5 Multi-Panel Alignment
220
6.5.5.1 Angle Tabs
224
Figure 6-43: Removing Links
225
6.5.6 Cut Depth Compensation
227
6.5.7 Negative Index
227
7 SAW PROCEDURES
229
7.1.4 Pre Non Contact Height
230
7.2 Blade Expansion
231
Blade Expansion
232
7.3 Height Procedures
233
7.3.1 Height Reference Device
235
To Perform Button Height:
236
7.3.2 Chuck Height
237
Height Procedures
239
7.4 Blade Handling
241
7.4.1.1.2 Wear Rate Chart
243
7.4.1.2 Export Data
244
7.4.1.3 Blade Change Tab
245
7.4.1.4 Blade Type Tab
246
7.4.1.5 Blade Status Tab
246
7.4.2.2 Blade Indicator
247
Blade Handling
248
7.4.2.3 Replacing a Blade
249
To Manually Tune the BBD:
249
To Replace a Blade:
250
7.4.3 Blade Dressing
255
7.4.3.3.2 Override Screen
259
To Perform Dressing Manually:
261
7.4.3.4.2 Dressing Screen
261
7.5 Chuck Change
265
Chuck Change
266
• Calibration Start Position
266
To Re-Teach Focus on Chuck:
267
8 SPECIAL FEATURES
269
Special Features
270
8.1 Load Monitoring
271
8.1.2.2 Raw Data
273
Load Monitoring
274
Figure 8-4: Control Screen
275
8.2 Language Selection
277
Figure 8-6)
278
8.3 Wafer Vacuum Check
279
Wafer Vacuum Check
280
8.4.1 Stress Release
281
8.4.2 Theta Motion Replay
282
8.5 Spindle Velocity
285
Spindle Velocity
286
8.8 Database Backup
291
Database Backup
292
Figure 8-11: Dicer Tree
293
13) X-limits respectively
294
Change of Length Unit Type
295
8.11 Multi-Panel Bar Code
297
Multi-Panel Bar Code
298
• Blade Change - Lot number
298
9 CONFIGURATION OPTIONS
299
Configuration Options
300
1 7100 model
301
2 Autoloader
301
Autoloader
303
9.1.2.1 CassComp Workbook
305
9.1.2.1.1 Axes
306
Figure 9-5: Finger Screen
308
9.1.2.1.2 Cassette1
309
9.1.2.2 MHS Workbook
309
Figure 9-8: MHS Axes Screen
311
9.1.3 Autoloader Operation
312
To Manually Load a Workpiece:
314
9.2 Tilted Spindle
319
Tilted Spindle
320
9.2.4 Mechanical Adjustments
325
To Adjust the Spindle Angle
326
To Adjust the Camera position
326
9.3 Dress Station
329
Dress Station
330
To Replace the Dressing Block
332
9.3.3 Dress Station Setup
333
9.3.4 Dressing Modes
334
9.3.4.1 Cut Mode
335
9.3.4.2 Chop Mode
335
9.4 Wash Pipe
337
Wash Pipe
338
9.4.1 Manual Operation
339
10 TROUBLESHOOTING
343
Troubleshooting
344
Error Message Information
346
10.2 Recipe Problems
347
Recipe Problems
348
10.3 Initializing the System
349
Initializing the System
350
10.4 Height Problem
351
Height Problem
352
Wizard appears
357
If Nothing Helps
359
KMI and Database
359
10.7 If Nothing Helps
361
10.8 UPS Bypass
363
UPS Bypass
364
A APPENDICES
367
The Model 7100 Glossary
368
Appendix 2: Algorithms
374
Align Algorithms
375
Kerf Check Algorithm
376
Bright Kerf Algorithm
376
Kerf Check Teach Algorithm
377
Appendix 3: Recipe Parameters
378
Align Parameters
379
Recipe Parameters
380
Align Kerf Model Parameters
384
Auto Height Compensation
385
Average Index Parameters
386
Bar Code Parameters
387
Blade Parameters
388
Max Cut Width
389
Cut Parameters
390
Cut Verify Parameters
394
Cut Verify Limit Parameters
396
Diagnostisc Parameters
397
Dressing Parameters
397
Dress Block Parameters
398
Height Parameters
400
Kerf Check Parameters
401
Kerf Check Limit Parameters
403
Load Monitor Baseline
405
Loop Cut Parameters
406
Manual Inspection Parameters
406
Model Precessing Parameters
408
MHS Parameters
409
Multi-Panel Parameters
409
Override Parameters
409
Shrinkage Parameters
410
Teach Center Parameters
412
Tilted Spindle Parameters
413
Wash Pipe Parameters
413
Y Offset Parameters
414
See Access Levels
417
See Dressing
417
See Height
417
See Kerf Check
418
See Assigning Recipes
418
See Override
419
Index-iv
420
See Workpiece
422
Index-viii
424
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