Open Loop Theta Accuracy Procedures
Advanced Dicing Technologies Ltd.
8.4-2
performing the Stress Release. The default value for this
parameter is 3.
8.4.2 Theta Motion Replay
While the system is being taught the Workpiece Alignment, it records
every movement of the Theta axis. Once the Theta Stress Release is
enabled, the system replays all the Theta motions, which had been taught
for a specific workpiece, each time when performing angle move. Having
Figure 8-7: Theta Align Stress Disabled
Figure 8-8: Theta Align Stress Enabled
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