ADT Model 7100 Semi-Automatic Dicing System Operations Manual
Workpiece Alignment
P/N 97100-9002-000-14 Ver 06/05
6.1-3
the location in the FOV. Adjust the Theta Axis, if required, by using
the Z/T Axis Controls.
4 Click Next. The Workpiece moves along the X-Axis until the left side of
the Workpiece is beneath the microscope. (This distance is limited by
the Area parameter in the Align category.)
5 Position the Reticle on the same Street edge using the X/Y-Axis
Control or by double-clicking the location in the FOV. Perform Theta
correction and Y-Axis correction.
6 Click Next. The Workpiece moves along the X-Axis until the right side
of the Workpiece is beneath the microscope. (This distance is limited by
the Area parameter in the Align category.)
7 Repeat Steps 4 to 6 by clicking Next to move from one side of the
Workpiece to the other and adjusting the position of the Reticle until
the Reticle remains on the edge of the Street in both positions.
8 Click Finish to complete the first step in the Manual Alignment
procedure. The Workpiece remains aligned until it is unloaded from
the Cutting Chuck
6.1.1.2 Defining Cut Position
The second step in Manual Alignment is defining a Cut Position, which is a
reference point on the Workpiece. It is recommended to select a Cut
Position at a well-defined point on the Workpiece.
Figure 6-2: Aligning the Reticle
Note: Even after clicking Finish, it is possible to return to previous steps in the
procedure by clicking Back.
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