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ADT Model 7100 Semi-Automatic Dicing System Operations Manual
P/N 97100-9002-000-14 Ver 06/05
1-3
• Exhibition Mode: This mode is intended for exhibition use and
allows to operate the System without connecting to a water supply. For
more information, refer to Appendix 5, "Exhibition Mode" of the
Maintenance Manual.
1.4 Available Models
The 7100 Series includes four models:
• 4" Fortis - 4" AC Spindle with Cable Type Turntable
• 4" Pro Fortis - 4" DC Spindle with Closed Loot Theta
• Vectus - 2" DC Spindle with Open Loop Theta
• Pro Vectus - 2" DC Spindle with Closed Loop Theta
1.5 Options
The Model 7100 can include one or more of the following options:
• Autoloader: enables automatic loading and unloading of workpieces
from cassettes.
• Multi-Language Interface: enables the GUI to switch between
English and the local language. For more information about currently
supported languages, refer to the latest Release Note.
• Tilted Spindle: This option enables the System to cut wafers at any
angle that falls between 0 and 15 degrees by changing the orientation
of the Spindle and the Microscope. Systems that include the Tilted
Spindle option, are delivered pre-configured with all the settings
necessary for cutting at both standard and tilted orientation.
• DC brushless, 30,000 RPM speed-controlled 4" Air Bearing Spindle
• Magnification: x30 (Pro Vectus and Pro Fortis only), x60, x120
(standard), x240.
• High Accuracy Theta Axis
• Dress Station - intended to periodically reshape and/or clean the
cutting blade in order to enhance the Kerf quality, without
interrupting the cutting process.
• Broken Blade Detector (BBD) - Optional for 7100 Vectus and 7100
ProVectus (2")
• Wash Pipe - used in addition to the spray bars for washing during the
dicing process.
Note: For detailed hardware configurations refer to section 1.6
- ADT 7100 1
- RECORD OF CHANGES 3
- SAFETY FIRST 4
- Safety Features 5
- Safety First 6
- BEFORE YOU BEGIN 8
- Contents at a Glance 9
- Reference Documents 10
- CONVENTIONS 11
- Abbreviations and Acronyms 12
- TABLE OF CONTENTS 13
- _______________________6.4-1 15
- LIST OF FIGURES 19
- List of Figures 20
- LIST OF TABLES 25
- List of Tables 26
- 1 INTRODUCTION 27
- 1.2 Standard Features 28
- 1.3 Modes of Operation 28
- 1.4 Available Models 29
- 1.5 Options 29
- Introduction 30
- 1.6 Available Models 31
- Available Models 32
- 2 SYSTEM DESCRIPTION 35
- System Description 36
- 2.1 Main Subsystems 37
- 2.1.1.3 Power Lights 39
- 2.1.2 Dicer 40
- 2.1.2.1 Vision System 41
- 2.1.2.1.2 Illumination 41
- 2.1.3 Light Tower 42
- Main Subsystems 44
- 2.2 Graphical User Interface 45
- 2.2.1 Menu Bar 46
- 2.2.1.3 Load Monitor Menu 47
- 2.2.1.4 Manual Menu 47
- 2.2.1.5 Maintenance Menu 48
- 2.2.2 Toolbar 49
- Graphical User Interface 50
- 2.2.3 Gauges 52
- 2.2.4 Dicer Status Indicator 53
- 2.2.5 Active User Field 54
- 2.2.6 Activity Log 54
- 2.2.7 Blade Indicator 54
- 2.2.8 Run Button 55
- 2.2.9 Stop Button 55
- 2.2.10 Workspaces 56
- 2.2.10.1 Main Workspace 58
- 2.2.10.1.1 Top View Area 59
- 1 Upper Limit 60
- 2 Lower Limit 60
- 2.2.10.1.2 Side View Area 61
- 2.2.10.2 Video Workspace 62
- 2.2.10.2.2 Display Controls 64
- 2.2.10.2.3 Zoom Controls 67
- To Enable the Zoom Option: 67
- To Use Digital Magnification: 68
- 2.2.10.2.5 Wizard/Model Area 69
- 2.2.10.2.7 Other Buttons 72
- 2.2.10.4 Workbook Workspace 74
- 2.3 System Configuration 83
- System Configuration 84
- 2.4 Menu Navigation Chart 85
- Menu Navigation Chart 86
- 3 SYSTEM OPERATION 87
- System Operation 88
- 3.1.1 Powering Up the System 89
- Powering Up/Down Procedures 90
- To Power Down the System: 91
- 3.1.2.1 Lockout/Tagout 91
- 3.2 Logging In 93
- Logging In 94
- 3.3 System Initialization 95
- System Initialization 96
- 3.4 Defining the Job 97
- Defining the Job 98
- Placing/Removing a Workpiece 100
- 3.6 Model 7100 Workflows 101
- Model 7100 Workflows 103
- 3.6.3 Manual Mode Workflow 105
- 3.6.4.4 Teaching the Index 106
- 3.6.4.1 Defining Jobs 106
- 3.6.4.1.1 Assigning Recipes 106
- 3.6.4.3 Teaching Alignment 106
- 3.6.4.5 Manual Alignment 107
- 3.6.4.6 Blade Changing 107
- 3.6.4.7 Manual Y Offset 107
- 3.7 Stopping System Operation 109
- 3.7.3 Pausing a Process 110
- 3.7.4 Manual Stop 110
- 3.8 Log File 111
- 3.8.1 Applying Log Filters 112
- 3.8.2 Log File Find Feature 112
- 3.8.3 Exporting Log Files 113
- 3.8.4 Periodical backup 113
- Log File 114
- 4 ADMINISTRATION 115
- Administration 116
- 4.1 Access Levels 117
- Access Levels 118
- 4.2 Modifying Access Levels 119
- 4.2.2 User Interface Elements 120
- Modifying Access Levels 121
- 4.2.3 Protected Mode 123
- 4.3 Adding and Removing Users 125
- Adding and Removing Users 126
- 5 BUILDING RECIPES 127
- Create a New Recipe 129
- Define Recipe 129
- Properties 129
- Specify Recipe 129
- Parameters 129
- Building Recipes Workflow 130
- 5.2 Creating a New Recipe 131
- Creating a New Recipe 132
- Defining Recipe Properties 133
- To Define Recipe Properties: 134
- To Change Blades: 138
- 5.3.2.2 Defining New Blades 138
- To Define a new blade: 139
- To Modify Blade Properties: 139
- 5.3.2.4 Deleting Blades 140
- To delete a blade: 140
- 5.4.1 Accessing Parameters 141
- Specifying Recipe Parameters 142
- To Display Recipe Parameters: 144
- 5.4.3.1 Defining Angles 145
- 5.4.3.1.1 Adding New Angles 145
- Workpiece 145
- Angle 90 145
- To Define New Angles: 146
- 5.4.3.1.2 Moving Angle Tabs 146
- 5.4.3.1.3 Modifying Angles 147
- To Modify Angles: 147
- 5.4.3.1.4 Angle Access Rights 148
- 5.4.3.2 Specifying Parameters 148
- 5.4.3.2.1 Adding Parameters 148
- To Modify Parameter Values: 150
- 5.4.3.2.3 Deleting Parameters 150
- To Export a Recipe: 151
- To Import a Recipe: 152
- 5.6 Recipe Templates 155
- 5.6.2 APC Loop Cut Template 156
- 5.6.3 GPC Standard Template 157
- Recipe Templates 158
- 5.6.6 GPC Dressing Template 160
- 6 DICER PROCEDURES 161
- Dicer Procedures 162
- 6.1 Workpiece Alignment 163
- 6.1.1 Manual Alignment 164
- 6.1.1.2 Defining Cut Position 165
- 6.1.2 Auto Alignment 166
- 6.1.2.1 Teach Index 167
- To Teach the Index: 167
- Workpiece Alignment 168
- To Teach the Index Manually: 170
- Move manually 171
- Street Dice 171
- Cut position 171
- Align Index 172
- To Select an Align Type: 173
- To Perform Teach Alignment: 175
- • Low Model Detection 176
- • Main Model Detection 176
- 6.1.3.3.1 Low Model Detection 177
- Figure 6-18 183
- 6.1.5 Model Types 184
- 6.1.5.2 Align Kerf Model 185
- 6.1.7 Rotational Shrinkage 187
- 6.1.8 Average Index 188
- 6.2 Cut Verification 193
- Cut Verification 194
- 6.2.2 Auto Cut Verification 195
- 6.3 Kerf Checking 197
- 6.3.3 Kerf Check Workflow 198
- Kerf Checking 199
- 6.3.4 Automatic Kerf Checking 200
- 6.3.4.1 Main Workspace Window 202
- 6.3.5 Manual Kerf Check 203
- 6.3.6 Teach Kerf Check 205
- To Teach the Kerf Check: 207
- Figure 6-32: Teach Kerf Check 208
- 6.3.7 Kerf Check Options 209
- 6.3.7.1 Adaptive 211
- 6.3.7.2 Advanced 211
- 6.3.7.3 Adaptive Only 211
- 6.3.7.4 Advanced Only 212
- 6.3.7.5 Upper Bar 212
- 6.3.7.6 Lower Bar 212
- 6.4 Manual Y Offset 213
- To Perform Manual Y Offset: 214
- 6.4.4 Y-Offset on Dress Block 215
- Cutting Location parameter 216
- 6.5 Special Cut Procedures 217
- 6.5.3 Loop Cut 218
- Special Cut Procedures 219
- 6.5.4 Chopping 220
- 6.5.5 Multi-Panel Alignment 220
- 6.5.5.1 Angle Tabs 224
- Figure 6-43: Removing Links 225
- 6.5.6 Cut Depth Compensation 227
- 6.5.7 Negative Index 227
- 7 SAW PROCEDURES 229
- 7.1.4 Pre Non Contact Height 230
- 7.2 Blade Expansion 231
- Blade Expansion 232
- 7.3 Height Procedures 233
- 7.3.1 Height Reference Device 235
- To Perform Button Height: 236
- 7.3.2 Chuck Height 237
- Height Procedures 239
- 7.4 Blade Handling 241
- 7.4.1.1.2 Wear Rate Chart 243
- 7.4.1.2 Export Data 244
- 7.4.1.3 Blade Change Tab 245
- 7.4.1.4 Blade Type Tab 246
- 7.4.1.5 Blade Status Tab 246
- 7.4.2.2 Blade Indicator 247
- Blade Handling 248
- 7.4.2.3 Replacing a Blade 249
- To Manually Tune the BBD: 249
- To Replace a Blade: 250
- 7.4.3 Blade Dressing 255
- 7.4.3.3.2 Override Screen 259
- To Perform Dressing Manually: 261
- 7.4.3.4.2 Dressing Screen 261
- 7.5 Chuck Change 265
- Chuck Change 266
- • Calibration Start Position 266
- To Re-Teach Focus on Chuck: 267
- 8 SPECIAL FEATURES 269
- Special Features 270
- 8.1 Load Monitoring 271
- 8.1.2.2 Raw Data 273
- Load Monitoring 274
- Figure 8-4: Control Screen 275
- 8.2 Language Selection 277
- Figure 8-6) 278
- 8.3 Wafer Vacuum Check 279
- Wafer Vacuum Check 280
- 8.4.1 Stress Release 281
- 8.4.2 Theta Motion Replay 282
- 8.5 Spindle Velocity 285
- Spindle Velocity 286
- 8.8 Database Backup 291
- Database Backup 292
- Figure 8-11: Dicer Tree 293
- 13) X-limits respectively 294
- Change of Length Unit Type 295
- 8.11 Multi-Panel Bar Code 297
- Multi-Panel Bar Code 298
- • Blade Change - Lot number 298
- 9 CONFIGURATION OPTIONS 299
- Configuration Options 300
- 1 7100 model 301
- 2 Autoloader 301
- Autoloader 303
- 9.1.2.1 CassComp Workbook 305
- 9.1.2.1.1 Axes 306
- Figure 9-5: Finger Screen 308
- 9.1.2.1.2 Cassette1 309
- 9.1.2.2 MHS Workbook 309
- Figure 9-8: MHS Axes Screen 311
- 9.1.3 Autoloader Operation 312
- To Manually Load a Workpiece: 314
- 9.2 Tilted Spindle 319
- Tilted Spindle 320
- 9.2.4 Mechanical Adjustments 325
- To Adjust the Spindle Angle 326
- To Adjust the Camera position 326
- 9.3 Dress Station 329
- Dress Station 330
- To Replace the Dressing Block 332
- 9.3.3 Dress Station Setup 333
- 9.3.4 Dressing Modes 334
- 9.3.4.1 Cut Mode 335
- 9.3.4.2 Chop Mode 335
- 9.4 Wash Pipe 337
- Wash Pipe 338
- 9.4.1 Manual Operation 339
- 10 TROUBLESHOOTING 343
- Troubleshooting 344
- Error Message Information 346
- 10.2 Recipe Problems 347
- Recipe Problems 348
- 10.3 Initializing the System 349
- Initializing the System 350
- 10.4 Height Problem 351
- Height Problem 352
- Wizard appears 357
- If Nothing Helps 359
- KMI and Database 359
- 10.7 If Nothing Helps 361
- 10.8 UPS Bypass 363
- UPS Bypass 364
- A APPENDICES 367
- The Model 7100 Glossary 368
- Appendix 2: Algorithms 374
- Align Algorithms 375
- Kerf Check Algorithm 376
- Bright Kerf Algorithm 376
- Kerf Check Teach Algorithm 377
- Appendix 3: Recipe Parameters 378
- Align Parameters 379
- Recipe Parameters 380
- Align Kerf Model Parameters 384
- Auto Height Compensation 385
- Average Index Parameters 386
- Bar Code Parameters 387
- Blade Parameters 388
- Max Cut Width 389
- Cut Parameters 390
- Cut Verify Parameters 394
- Cut Verify Limit Parameters 396
- Diagnostisc Parameters 397
- Dressing Parameters 397
- Dress Block Parameters 398
- Height Parameters 400
- Kerf Check Parameters 401
- Kerf Check Limit Parameters 403
- Load Monitor Baseline 405
- Loop Cut Parameters 406
- Manual Inspection Parameters 406
- Model Precessing Parameters 408
- MHS Parameters 409
- Multi-Panel Parameters 409
- Override Parameters 409
- Shrinkage Parameters 410
- Teach Center Parameters 412
- Tilted Spindle Parameters 413
- Wash Pipe Parameters 413
- Y Offset Parameters 414
- See Access Levels 417
- See Dressing 417
- See Height 417
- See Kerf Check 418
- See Assigning Recipes 418
- See Override 419
- Index-iv 420
- See Workpiece 422
- Index-viii 424
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